ProtoMEMS specializes in custom nanofabrication, process development and prototype manufacturing of Micro-Electro-Mechanical-Systems (MEMS) and devices including: CAD Layout, Photomask Making, Resist/Polymer Processing, Lithography (Contact, Optical & Ebeam), Reactive Ion Etching (RIE), DRIE, Wet Chemical Etching, Thin Film Deposition, Ion Implantation, Furnace Processing, Wafer Bonding, Drilling, Milling and Dicing, Chemical Mechanical Polishing and more…